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Publication details

Formation of excited Ag atoms in sputtering of silver

Journal Article

Šroubek Zdeněk, Šroubek Filip, Wucher A., Yarmoff J. A.


serial: Physical Review. B vol.68, 11 (2003), p. 1-5

research: CEZ:AV0Z1075907

project(s): INT-9900469, NSF, CHE-0091328, NSF

keywords: electronic excitation, sputtering

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abstract (eng):

A model is presented for the formation of excited Ag atoms during sputtering of Ag metal by energetic Ar ions. The essential part of the formation process is the slow diffusion of 4d holes in the collision cascade from the sites of violent Ag-Ag collisions to the emitted Ag atoms. A computer simulation of Ag cascades and of the 4d-hole transport allows us to quantify the model and to describe all characteristic features of the available experimental data.

Cosati: 20K

RIV: BM

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Last modification: 21.12.2012
Institute of Information Theory and Automation